THERMAL AND RADIATION RESISTANCE OF CLUSTERS OF IMPURITY ATOMS IN SILICON

Authors

  • Z. M. Saparniyazova Karakalpak State University named after Berdakh
  • G.S. Saparniyazova Karakalpak State University named after Berdakh
  • S.A. Davletova Karakalpak State University named after Berdakh
  • E.Ya. Xojaniyazova Karakalpak State University named after Berdakh
  • G.J. Jabbarbergenova Karakalpak State University named after Berdakh

Keywords:

irradiation, thermal annealing, silicon, manganese, doping, cluster, Coulomb force.

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Published

2023-04-12

Issue

Vol. 4 No. 04 (2023): wos

Section

Articles

How to Cite

THERMAL AND RADIATION RESISTANCE OF CLUSTERS OF IMPURITY ATOMS IN SILICON. (2023). Academia Science Repository, 4(04), 384-390. https://academiascience.com/index.php/repo/article/view/203