THERMAL AND RADIATION RESISTANCE OF CLUSTERS OF IMPURITY ATOMS IN SILICON

Авторы

  • Z. M. Saparniyazova Karakalpak State University named after Berdakh
  • G.S. Saparniyazova Karakalpak State University named after Berdakh
  • S.A. Davletova Karakalpak State University named after Berdakh
  • E.Ya. Xojaniyazova Karakalpak State University named after Berdakh
  • G.J. Jabbarbergenova Karakalpak State University named after Berdakh

Ключевые слова:

irradiation, thermal annealing, silicon, manganese, doping, cluster, Coulomb force.

Загрузки

Опубликован

2023-04-12

Выпуск

Том 4 № 04 (2023): wos

Раздел

Articles

Как цитировать

THERMAL AND RADIATION RESISTANCE OF CLUSTERS OF IMPURITY ATOMS IN SILICON. (2023). Academia Science Repository, 4(04), 384-390. https://academiascience.com/index.php/repo/article/view/203