THERMAL AND RADIATION RESISTANCE OF CLUSTERS OF IMPURITY ATOMS IN SILICON

Z. M. Saparniyazova; G.S. Saparniyazova; S.A. Davletova; E.Ya. Xojaniyazova; G.J. Jabbarbergenova

THERMAL AND RADIATION RESISTANCE OF CLUSTERS OF IMPURITY ATOMS IN SILICON

Authors

Z. M. Saparniyazova Karakalpak State University named after Berdakh
G.S. Saparniyazova Karakalpak State University named after Berdakh
S.A. Davletova Karakalpak State University named after Berdakh
E.Ya. Xojaniyazova Karakalpak State University named after Berdakh
G.J. Jabbarbergenova Karakalpak State University named after Berdakh

Keywords:

irradiation, thermal annealing, silicon, manganese, doping, cluster, Coulomb force.

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Published

2023-04-12

How to Cite

Z. M. Saparniyazova, G.S. Saparniyazova, S.A. Davletova, E.Ya. Xojaniyazova, & G.J. Jabbarbergenova. (2023). THERMAL AND RADIATION RESISTANCE OF CLUSTERS OF IMPURITY ATOMS IN SILICON. Academia Science Repository, 4(04), 384–390. Retrieved from http://academiascience.com/index.php/repo/article/view/203